Faites connaître cet article à vos amis:
Materials & Process Integration for MEMS - Microsystems Francis E H Tay 2002 edition
Prix
€ 168,49
Commandé depuis un entrepôt distant
Livraison prévue 1 - 15 sept.
Recevez une notification pour les nouvelles sorties de Francis E H Tay
Nos clients disent :
Ajouter à votre liste de souhaits iMusic
Également disponible en tant que :
Materials & Process Integration for MEMS - Microsystems
Francis E H Tay
Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures.
299 pages, biography
| Médias | Livres Hardcover Book (Livre avec dos et couverture rigide) |
| Validé | 31 août 2002 |
| ISBN13 | 9781402071751 |
| Éditeurs | Springer-Verlag New York Inc. |
| Pages | 299 |
| Dimensions | 155 × 235 × 19 mm · 712 g |
| Langue et grammaire | Anglais |
| Éditeur | Tay, Francis E. H. |
Plus par Francis E H Tay
Afficher tout![Cover for Francis E H Tay · Microfluidics and BioMEMS Applications - Microsystems (Hardcover Book) [2002 edition] (2002)](https://imusic.b-cdn.net/images/item/original/376/9781402072376.jpg?francis-e-h-tay-2002-microfluidics-and-biomems-applications-microsystems-hardcover-book&class=scaled&v=1605561716)
Plus d'ouvrages du même éditeur
![Cover for Hendrik Van den Berg · The Economics of Immigration: Theory, History and Policy - Population Economics (Hardcover Book) [Third Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/477/9781071654477.jpg?hendrik-van-den-berg-2026-the-economics-of-immigration-theory-history-and-policy-population-economics-hardcover-book&class=scaled&v=1780314393)
![Cover for Loring W. Tu · An Introduction to Manifolds - Universitext (Paperback Book) [Third Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/364/9781071653364.jpg?loring-w-tu-2026-an-introduction-to-manifolds-universitext-paperback-book&class=scaled&v=1780314358)
![Cover for Observing Photons in Space: A Guide to Experimental Space Astronomy - ISSI Scientific Report Series (Hardcover Book) [Third Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/231/9781071654231.jpg?2026-observing-photons-in-space-a-guide-to-experimental-space-astronomy-issi-scientific-report-series-hardcover-book&class=scaled&v=1780314405)
![Cover for Andre Anders · Cathodic Arcs: From Fractal Spots to Energetic Deposition - Springer Series on Atomic, Optical, and Plasma Physics (Hardcover Book) [Second Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/835/9781071654835.jpg?andre-anders-2026-cathodic-arcs-from-fractal-spots-to-energetic-deposition-springer-series-on-atomic-optical-and-plasma-physics-hardcover-book&class=scaled&v=1780314416)
![Cover for Accelerator Physics at the Tevatron Collider - Particle Acceleration and Detection (Hardcover Book) [Second Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/791/9781071653791.jpg?2026-accelerator-physics-at-the-tevatron-collider-particle-acceleration-and-detection-hardcover-book&class=scaled&v=1782130051)
![Cover for Peptide Nucleic Acids: Methods and Protocols - Methods in Molecular Biology (Hardcover Book) [Fourth Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/678/9781071653678.jpg?2026-peptide-nucleic-acids-methods-and-protocols-methods-in-molecular-biology-hardcover-book&class=scaled&v=1780314367)
![Cover for RNA Chaperones: Methods and Protocols - Methods in Molecular Biology (Hardcover Book) [Second Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/715/9781071653715.jpg?2026-rna-chaperones-methods-and-protocols-methods-in-molecular-biology-hardcover-book&class=scaled&v=1782130048)
![Cover for Collagen: Methods and Protocols - Methods in Molecular Biology (Hardcover Book) [Second Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/933/9781071651933.jpg?2026-collagen-methods-and-protocols-methods-in-molecular-biology-hardcover-book&class=scaled&v=1775081440)
![Cover for Ulrich Daepp · Reading, Writing, and Proving: A Closer Look at Mathematics - Undergraduate Texts in Mathematics (Hardcover Book) [Third Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/373/9781071646373.jpg?ulrich-daepp-2026-reading-writing-and-proving-a-closer-look-at-mathematics-undergraduate-texts-in-mathematics-hardcover-book&class=scaled&v=1746741961)
![Cover for Christian Dahmann · Drosophila: Methods and Protocols - Methods in Molecular Biology (Paperback Book) [Third Edition 2022 edition] (2023)](https://imusic.b-cdn.net/images/item/original/439/9781071625439.jpg?christian-dahmann-2023-drosophila-methods-and-protocols-methods-in-molecular-biology-paperback-book&class=scaled&v=1713663754)
![Cover for Philip J. Atherton · Neuromuscular Assessments of Form and Function - Neuromethods (Hardcover Book) [2023 edition] (2023)](https://imusic.b-cdn.net/images/item/original/144/9781071633144.jpg?philip-j-atherton-2023-neuromuscular-assessments-of-form-and-function-neuromethods-hardcover-book&class=scaled&v=1713564102)
![Cover for Michele J. Hoffmann · Urothelial Carcinoma: Methods and Protocols - Methods in Molecular Biology (Hardcover Book) [Second Edition 2023 edition] (2023)](https://imusic.b-cdn.net/images/item/original/901/9781071632901.jpg?michele-j-hoffmann-2023-urothelial-carcinoma-methods-and-protocols-methods-in-molecular-biology-hardcover-book&class=scaled&v=1713712776)
![Cover for Laura M Cole · Imaging Mass Spectrometry: Methods and Protocols - Methods in Molecular Biology (Hardcover Book) [Second Edition 2023 edition] (2023)](https://imusic.b-cdn.net/images/item/original/182/9781071633182.jpg?laura-m-cole-2023-imaging-mass-spectrometry-methods-and-protocols-methods-in-molecular-biology-hardcover-book&class=scaled&v=1713670973)
![Cover for Giovanni Samaey · The Invisible Power of Mathematics: The Pervasive Impact of Mathematical Engineering in Everyday Life - Copernicus Books (Paperback Book) [1st ed. 2022 edition] (2023)](https://imusic.b-cdn.net/images/item/original/754/9781071627754.jpg?giovanni-samaey-2023-the-invisible-power-of-mathematics-the-pervasive-impact-of-mathematical-engineering-in-everyday-life-copernicus-books-paperback-book&class=scaled&v=1671563312)
![Cover for Bertram Kostant · Collected Papers: Volume IV 1991–2000 (Hardcover Book) [1st ed. 2023 edition] (2022)](https://imusic.b-cdn.net/images/item/original/882/9780387095882.jpg?bertram-kostant-2022-collected-papers-volume-iv-1991-2000-hardcover-book&class=scaled&v=1617098595)
![Cover for Bertram Kostant · Collected Papers: Volume III 1978–1990 (Hardcover Book) [1st ed. 2023 edition] (2022)](https://imusic.b-cdn.net/images/item/original/868/9780387095868.jpg?bertram-kostant-2022-collected-papers-volume-iii-1978-1990-hardcover-book&class=scaled&v=1671543349)
![Cover for Bertram Kostant · Collected Papers: Volume II 1967–1977 (Hardcover Book) [1st ed. 2023 edition] (2022)](https://imusic.b-cdn.net/images/item/original/844/9780387095844.jpg?bertram-kostant-2022-collected-papers-volume-ii-1967-1977-hardcover-book&class=scaled&v=1667037049)
![Cover for Fengwei Bai · West Nile Virus: Methods and Protocols - Methods in Molecular Biology (Hardcover Book) [2023 edition] (2022)](https://imusic.b-cdn.net/images/item/original/594/9781071627594.jpg?fengwei-bai-2022-west-nile-virus-methods-and-protocols-methods-in-molecular-biology-hardcover-book&class=scaled&v=1693054562)
![Cover for Bertram Kostant · Collected Papers: Volume V 2001–2015 (Hardcover Book) [1st ed. 2023 edition] (2022)](https://imusic.b-cdn.net/images/item/original/905/9780387095905.jpg?bertram-kostant-2022-collected-papers-volume-v-2001-2015-hardcover-book&class=scaled&v=1634960338)
![Cover for Clive A. Edwards · Biology and Ecology of Earthworms (Hardcover Book) [Fourth Edition 2022 edition] (2022)](https://imusic.b-cdn.net/images/item/original/426/9780387749426.jpg?clive-a-edwards-2022-biology-and-ecology-of-earthworms-hardcover-book&class=scaled&v=1559408970)
Voir tous les Francis E H Tay ( par ex. Hardcover Book et Paperback Book )