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![Cover for Takeshi Hattori · Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing (Paperback Book) [Softcover reprint of hardcover 1st ed. 1998 edition] (2010)](https://imusic.b-cdn.net/images/item/original/726/9783642082726.jpg?takeshi-hattori-2010-ultraclean-surface-processing-of-silicon-wafers-secrets-of-vlsi-manufacturing-paperback-book&class=scaled&v=1438344256)