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![Cover for M R Oliver · Chemical-Mechanical Planarization of Semiconductor Materials - Springer Series in Materials Science (Paperback Book) [Softcover reprint of hardcover 1st ed. 2004 edition] (2010)](https://imusic.b-cdn.net/images/item/original/388/9783642077388.jpg?m-r-oliver-2010-chemical-mechanical-planarization-of-semiconductor-materials-springer-series-in-materials-science-paperback-book&class=scaled&v=1582918151)