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![Cover for Kamil A. Valiev · The Physics of Submicron Lithography - Microdevices (Paperback Book) [Softcover reprint of the original 1st ed. 1992 edition] (2012)](https://imusic.b-cdn.net/images/item/original/610/9781461364610.jpg?kamil-a-valiev-2012-the-physics-of-submicron-lithography-microdevices-paperback-book&class=scaled&v=1509876558)
![Cover for Kamil A. Valiev · The Physics of Submicron Lithography - Microdevices (Hardcover Book) [1992 edition] (1992)](https://imusic.b-cdn.net/images/item/original/782/9780306435782.jpg?kamil-a-valiev-1992-the-physics-of-submicron-lithography-microdevices-hardcover-book&class=scaled&v=1408565831)