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![Cover for Hiroo Ukita · Micromechanical Photonics - Microtechnology and MEMS (Paperback Book) [Softcover reprint of hardcover 1st ed. 2006 edition] (2010)](https://imusic.b-cdn.net/images/item/original/423/9783642068423.jpg?hiroo-ukita-2010-micromechanical-photonics-microtechnology-and-mems-paperback-book&class=scaled&v=1408464904)
![Cover for Hiroo Ukita · Micromechanical Photonics - Microtechnology and MEMS (Hardcover Book) [2006 edition] (2006)](https://imusic.b-cdn.net/images/item/original/335/9783540313335.jpg?hiroo-ukita-2006-micromechanical-photonics-microtechnology-and-mems-hardcover-book&class=scaled&v=1456156043)